Overview
Table of contents
The Semiconductor IndustryInternational Technology Roadmap for SemiconductorsSemiconductor Materials and Process ChemicalsManufacturing WafersOverview of Wafer Fabrication300mm wafer diameter processingContamination ControlProcess YieldsNanotechnology ProcessesOxidationBasic Patterning -- Surface Preparation to ExposureBasic Patterning -- Developing to Final InspectionAdvanced Photolithography ProcessesDopingDeposition of Dielectrics and Semiconductor LayersMetalization: Wiring the Chip CompositesProcess and Device EvaluationThe Business of Water FabricationGreen ProcessingSemiconductor Devices and Integrated Circuit FormationNanotechnology DevicesIntegrated Circuit TypesPackagingGLOSSARY
Author comments
Peter Van Zant is an internationally known semiconductor professional with an extensive background in process engineering, training, consulting, and writing. Principal of Peter Van Zant Associates, a firm that supplies writing, training, and consulting services to business and industry, he is the author of Semiconductor Technology Glossary, Third Edition; Integrated Circuits Text; Safety First Manual; and Chip Packaging Manual. His books and training materials are used by chip manufacturers, industry suppliers, colleges, and universities. Peter Van Zant Associates' customers include Intel, National Semiconductor, Applied Materials, Air Products and Chemicals, SCP Global Inc., and a number of educational institutions. Mr. Van Zant is also the elected District 1 Supervisor in his home county of Nevada in California.
Back cover copy
New to this Edition:
* Nanotechnology
* 300-mm Wafer Processing
* "Green" Processes and Devices
* New Fabrication Advances
The #1 book in the industry -- completely revised and updated
A perfect introduction to the industry that drives high tech, Microchip Fabrication offers a low-math, straight-talk approach to the entire process of semiconductor processing -- from raw materials through shipping the finished, packaged device. With lots of detailed illustrations and analogies to everyday life, this is the industry's most novice-friendly text!
Used for training, teaching, and vocational-technical programs, Microchip Fabrication covers every stage of semiconductor processing, from raw material preparation to packaging and testing and traditional and state-of-the-art processes. Each chapter contains quizzes and review summaries buttressed by an extensive glossary.
By the time you've finished Microchip Fabrication, you'll have a solid working knowledge of the important issues and processes and materials and methods involved in semiconductor technology, whether on the subatomic level or in the context of large-scale industrial practices.
Review:
" ... An excellent reference for anyone who wishes to know more about the technical side of semiconductor manufacturing. It is well-indexed, and the chapters are self-contained enough to make it useful for catching up on one topic at a time." -- FabTime, on the previous edition
